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An Excel 97 spreadsheet is available to assist in the interpretation of angle-resolved XPS data, in terms of a simple model in which a planar substrate is covered to a uniform depth by a partial or complete overlayer. Up to three elements and six photoemission angles may be specified. This spreadsheet is to be preferred for samples consisting of discrete layers, such as an oxide film on a metal substrate. Word 97 is required to read the included instructions.

Download ARXPS version (0.99 mb)

ARXPS version 7.1 (released 23 January 2009) - An Excel 2003 spreadsheet omitting the discrete layer model in ARXPS.ZIP, but including several three-parameter models based on "Paynter's method", a modified Maximum Entropy method, Tikhonov regularization, three profile types derived from Fick's law of diffusion and two non-Fickian diffusion profiles. This spreadsheet is to be preferred for samples that contain concentration gradients in the surface profile, such as plasma-modified polymers. The instructions are included as a PDF file.


A stand-alone Windows application written in Visual Basic to solve ARXPS data obtained on simple, two-component samples (released 23 October 2003). This application contains a boxcar, a trapezoid and a constrained exponential decay profile model.

arxpsolver image

This software was written to simplify the interpretation of ARXPS data obtained from simple 2-component samples such as a hydrocarbon polymer exposed to an oxygen plasma. It has a non-threatening graphical interface and is reasonably simple to use and so might also be useful for teaching or learning about angle-resolved X-ray photoelectron spectroscopy. ARXPSolver was written in Visual Basic for Microsoft Windows and requires the Microsoft .NET framework to be installed on your computer (Windows XP users already have it). The software is provided "as-is" with no warranty or guarantee whatsoever, expressed or implied.

Download ARXPSolver (10 mb)

Unzip the download file to a temporary directory and run "setup.exe" in the "release" sub-directory. To uninstall the program, use add/remove programs in the Windows Control Panel found in the Start menu. Be sure to study the documentation provided with the program.

Note (23 October 03): The Cumpson profile has been removed from this first release version of the software, although the documentation makes reference to it. If you wish to calculate profiles using Cumpson's parameter set please download ARCtick.

An Introduction to ARXPS

Download ARXPSintro.cdf (4.1 mb)

A Mathematica notebook (added 29 January 2013) intended to explain the mathematical underpinnings of ARXPS from the Beer-Lambert equation to maximum entropy regularization. The notebook can be read (and the 3-D graphics manipulated) with the free Wolfram CDF Player.